Willard Harrison Bennett (1903 - 1987) was a scientist and inventor. Bennett was born in Findlay, Ohio. Bennett conducted research into plasma physics, astrophysics, geophysics, surface physics, and physical chemistry

Bennett invented radio frequency mass spectrometry (1955). . Bennett's radio frequency mass spectrometer measured the masses of atoms. It was the first such experiment in space. He also reseached gases ionized by high voltage electricity. This reseach was used in later thermonuclear fusion research. Bennett hold 70 United States and foreign patents.